We are looking for distributors
- ✓Distributor of analytical and scientific equipment with experience in vacuum systems & mass spectrometry, often participating in bidding for institutes/schools
- ✓The company provides vacuum equipment, components and technical services to fab/OSAT, display factories
- ✓Service laboratories, materials testing and inspection centers want to add hydrogen and outgas testing
- ✓Semiconductor and component FDI enterprises (Samsung, Hana Micron, Amkor, Intel...): QC department, error analysis, contamination management
- ✓National semiconductor institutes, schools & projects: Vietnam Academy of Science and Technology, Hanoi University of Science and Technology, Vietnam National University Hanoi/HCMC, Viettel (Hoa Lac fab)
Product details
The IVT TDS Series is a Thermal Desorption Spectroscopy analysis system designed to identify gas species and measure trace quantities of gas emitted from materials upon heating. Going beyond surface-level testing, it empowers R&D and QC departments to perform in-depth evaluations of factors affecting the quality of wafers, thin films, metals, and advanced materials.
IVT currently offers two main lineups. The fTDS series is tailored for the semiconductor industry, enabling direct measurement of full-size wafers up to 300 mm in diameter. It features a mass range of 1–512 amu, full-stage heating up to 950 °C, and localized heating up to 1,400 °C. The measurement chamber achieves an ultimate vacuum below $5 \times 10^{-9}\text{ mbar}$, effectively reducing background gas levels and enhancing trace impurity detection sensitivity. The entire workflow—from wafer loading to measurement and data processing—can be fully automated.
sTDS is designed for steel, metals, and small material specimens, making it particularly suitable for the qualitative and quantitative analysis of hydrogen associated with hydrogen embrittlement. The system supports specimens up to 20 × 20 × 3 mm, provides infrared heating up to 1,400 °C, and enables analysis under ultra-high vacuum conditions at the 10⁻⁹ mbar level.
A key feature of the IVT is its fully integrated system, combining sample heating, an ultra-high vacuum system, gas mass analysis, and data acquisition. This eliminates the need for users to separately configure and integrate multiple standalone components such as gas detectors, vacuum systems, and heating units.
IVT also provides TDS sample analysis services, allowing customers to submit actual samples and review the resulting data before deciding to invest in the equipment. The manufacturer has also established comparative data using NIST hydrogen reference standards, helping to enhance the reliability of quantitative analysis applications.
The product is well suited for semiconductor, display, steel, and advanced metal manufacturing facilities, as well as R&D centers, research institutes, universities, and material testing laboratories that require control and analysis of trace-level impurities, outgassing, or hydrogen.
About the brand
IVT Co., Ltd. is a Korean technology enterprise established in 2008, specializing in developing ultra-high vacuum equipment, TDS analysis systems and material testing equipment for the semiconductor, display and metal industries. IVT has developed and provided automatic TDS systems for Samsung Electronics since 2010, and was selected as a tier 1 supplier of Samsung Electronics in 2011. The company also participates in equipment development and localization projects with Samsung Electronics, the Korea Institute of Standards and Science (KRISS) and Korean technology research organizations. In addition to equipment manufacturing capabilities, IVT also provides sample analysis services and in-depth technical support, and owns ISO 45001:2018, KOSHA safety certification, patents and trademarks related to TDS.
